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Lighting Basics

DMP Cleaner works like this: After substrate being grinded by the diamond grinding fluid, to use a high pressure water column and chemicals to clean the residual chemical polishing liquid on the sapphire substrate surface. Because many customers changed the original Template in the CMP into Paste Wax during the manufacturing process, in order to achieve better control of TTV and BOW. Then, DMP Cleaner becomes the middle bridging cleaning equipment between DMP process and CMP process, and is required to thoroughly clean diamond grinding fluid to protect substrate from residual diamond grinding fluid in the CMP process. So the cleaning after DMP process is particularly important. At present, this equipment's main target customers are those who produce 4 to 6 inches wafer, and it can absolutely improve performance of the products quality.

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